Research Article

CASINO V2.42—A Fast and Easy-to-use Modeling Tool for Scanning Electron Microscopy and Microanalysis Users

  1. Dominique Drouin1,*,
  2. Alexandre Réal Couture1,
  3. Dany Joly1,
  4. Xavier Tastet1,
  5. Vincent Aimez1,
  6. Raynald Gauvin2

Article first published online: 23 APR 2007

DOI: 10.1002/sca.20000

Issue

Scanning

Scanning

Volume 29, Issue 3, pages 92–101, May/June 2007

Additional Information

How to Cite

Drouin, D., Couture, A. R., Joly, D., Tastet, X., Aimez, V. and Gauvin, R. (2007), CASINO V2.42—A Fast and Easy-to-use Modeling Tool for Scanning Electron Microscopy and Microanalysis Users. Scanning, 29: 92–101. doi: 10.1002/sca.20000

Author Information

  1. 1

    Electrical Engineering Department, Universite de Sherbrooke, Sherbrooke, Québec, J1K 2R1, Canada

  2. 2

    Department Mining, Metals and Materials Engineering, McGill University, Montreal, H3A 2B2 , Canada

*Département de génie électrique et génie informatique, Université de Sherbrooke, Sherbrooke (Québec), J1K 2R1, Canada

Publication History

  1. Issue published online: 18 JUN 2007
  2. Article first published online: 23 APR 2007
  3. Manuscript Accepted: 25 JAN 2007
  4. Manuscript Received: 8 DEC 2006

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Keywords:

  • Monte Carlo simulation software;
  • scanning electron microscopy;
  • BE line scan;
  • X-ray line scan;
  • E-beam lithography

Abstract

Monte Carlo simulations have been widely used by microscopists for the last few decades. In the beginning it was a tedious and slow process, requiring a high level of computer skills from users and long computational times. Recent progress in the microelectronics industry now provides researchers with affordable desktop computers with clock rates greater than 3 GHz. With this type of computing power routinely available, Monte Carlo simulation is no longer an exclusive or long (overnight) process. The aim of this paper is to present a new user-friendly simulation program based on the earlier CASINO Monte Carlo program. The intent of this software is to assist scanning electron microscope users in interpretation of imaging and microanalysis and also with more advanced procedures including electron-beam lithography. This version uses a new architecture that provides results twice as quickly. This program is freely available to the scientific community and can be downloaded from the website: www.gel.usherb.ca/casino. SCANNING 29: 000-000, 2007. © 2007 Wiley Periodicals, Inc.

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