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Research Article
Skirting: A Limitation for the Performance of X-ray Microanalysis in the Variable Pressure or Environmental Scanning Electron Microscope
Article first published online: 23 APR 2007
DOI: 10.1002/sca.20052
Copyright © 2007 Wiley Periodicals, Inc.
Additional Information
How to Cite
Le Berre, J. F., Demopoulos, G. P. and Gauvin, R. (2007), Skirting: A Limitation for the Performance of X-ray Microanalysis in the Variable Pressure or Environmental Scanning Electron Microscope. Scanning, 29: 114–122. doi: 10.1002/sca.20052
Publication History
- Issue published online: 18 JUN 2007
- Article first published online: 23 APR 2007
- Manuscript Accepted: 8 FEB 2007
- Manuscript Received: 16 OCT 2006
- Abstract
- References
- Cited By
Keywords:
- X-ray microanalysis;
- skirting;
- VP-SEM;
- ESEM
Abstract
The variable pressure or environmental scanning electron microscope (VP-SEM; ESEM) has become the microscope of choice for many scientists and technologists. Hence, the development of robust methods for X-ray microanalysis, limited by skirting, has become critical. In this paper, two pressure variation correction methods (Doehne and Gauvin) are compared. Both of these methods appear to be effective; the results were found to be well within 10% of the values obtained at 0 Pa. The Doehne method is dependent on an empirical factor (D), therefore the accuracy of the results will depend on the accuracy of this value. Also the Doehne method is compromised by the nonlinearity of the response with pressure. The Gauvin method is more user-friendly and more precise when considering the total range of pressure. SCANNING 29: 000-V000, 2007. © 2007 Wiley Periodicals, Inc.