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Three-dimensional electron microscopy simulation with the CASINO Monte Carlo software

  1. Hendrix Demers1,
  2. Nicolas Poirier-Demers1,
  3. Alexandre Réal Couture1,
  4. Dany Joly1,
  5. Marc Guilmain1,
  6. Niels de Jonge2,
  7. Dominique Drouin1,*

Article first published online: 18 JUL 2011

DOI: 10.1002/sca.20262

Issue

Scanning

Scanning

Special Issue: Twenty Years of Joy Scanning Electron Microscopy Imaging, Microanalysis, and Simulation

Volume 33, Issue 3, pages 135–146, May/June 2011

Additional Information

How to Cite

Demers, H., Poirier-Demers, N., Couture, A. R., Joly, D., Guilmain, M., de Jonge, N. and Drouin, D. (2011), Three-dimensional electron microscopy simulation with the CASINO Monte Carlo software. Scanning, 33: 135–146. doi: 10.1002/sca.20262

Author Information

  1. 1

    Electrical and Computer Engineering Department, Universite de Sherbrooke, Sherbrooke, Quebec, Canada

  2. 2

    Department of Molecular Physiology and Biophysics, Vanderbilt University School of Medicine, Nashville, Tennessee

*Electrical and Computer Engineering Department, Universite de Sherbrooke, Sherbrooke, Quebec, Canada J1K 2R1

Publication History

  1. Issue published online: 20 JUL 2011
  2. Article first published online: 18 JUL 2011
  3. Manuscript Accepted: 7 JUN 2011
  4. Manuscript Received: 18 APR 2011

Funded by

  • NSERC
  • NIH. Grant Number: R01-GM081801

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Keywords:

  • Monte Carlo simulation;
  • scanning electron microscopy;
  • scanning transmission electron microscopy;
  • secondary electron;
  • three-dimensional (3D)

Abstract

Monte Carlo softwares are widely used to understand the capabilities of electron microscopes. To study more realistic applications with complex samples, 3D Monte Carlo softwares are needed. In this article, the development of the 3D version of CASINO is presented. The software feature a graphical user interface, an efficient (in relation to simulation time and memory use) 3D simulation model, accurate physic models for electron microscopy applications, and it is available freely to the scientific community at this website: www.gel.usherbrooke.ca/casino/index.html. It can be used to model backscattered, secondary, and transmitted electron signals as well as absorbed energy. The software features like scan points and shot noise allow the simulation and study of realistic experimental conditions. This software has an improved energy range for scanning electron microscopy and scanning transmission electron microscopy applications. SCANNING 33:135–146, 2011. © 2011 Wiley Periodicals, Inc.

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