Certain commercial equipment is identified in this work to adequately describe the experimental procedure. Such identification does not imply recommendation or endorsement by the National Institute of Standards and Technology, nor does it imply that the equipment identified is necessarily the best available for the purpose.
Does your SEM Really tell the truth?—how would you know? Part 1
Article first published online: 20 FEB 2013
© Wiley Periodicals, Inc.
Volume 35, Issue 6, pages 355–361, November-December 2013
How to Cite
Postek, M. T. and Vladár, A. E. (2013), Does your SEM Really tell the truth?—how would you know? Part 1. Scanning, 35: 355–361. doi: 10.1002/sca.21075
Contribution of the National Institute of Standards and Technology; not subject to copyright.
- Issue published online: 19 DEC 2013
- Article first published online: 20 FEB 2013
- Manuscript Accepted: 2 JAN 2013
- Manuscript Received: 18 DEC 2012
- Monte Carlo;
- scanning electron microscope;
The scanning electron microscope (SEM) has gone through a tremendous evolution to become a critical tool for many and diverse scientific and industrial applications. The high resolution of the SEM is especially suited for both qualitative and quantitative applications especially for nanotechnology and nanomanufacturing. Quantitatively, measurement, or metrology is one of the main uses. It is likely that one of the first questions asked before even the first scanning electron micrograph was ever recorded was: “… how big is that?” The quality of that answer has improved a great deal over the past few years especially since today these instruments are being used as a primary measurement tool on semiconductor processing lines to monitor the manufacturing processes. The well-articulated needs of semiconductor production prompted a rapid evolution of the instrument and its capabilities. Over the past 20 years or so, instrument manufacturers, through substantial semiconductor industry investment of research and development (R&D) money, have vastly improved the performance of these instruments. All users have benefited from this investment, especially where quantitative measurements with an SEM are concerned. But, how good are these data? This article discusses some of the most important aspects and larger issues associated with imaging and measurements with the SEM that every user should know, and understand before any critical quantitative work is attempted. SCANNING 35:355–361, 2013. © 2013 Wiley Periodicals, Inc. SCANNING 35:???–???, 2013. © 2013 Wiley Periodicals, Inc.