Special raster scanning for reduction of charging effects in scanning electron microscopy
Article first published online: 29 JUL 2013
© 2013 Wiley Periodicals, Inc.
Volume 36, Issue 3, pages 327–333, May/June 2014
How to Cite
Suzuki, K. and Oho, E. (2014), Special raster scanning for reduction of charging effects in scanning electron microscopy. Scanning, 36: 327–333. doi: 10.1002/sca.21112
- Issue published online: 4 JUN 2014
- Article first published online: 29 JUL 2013
- Manuscript Accepted: 14 JUN 2013
- Manuscript Received: 23 FEB 2013
- charging effect;
- digital image processing;
- image quality;
- scanning electron microscope;
A special raster scanning (SRS) method for reduction of charging effects is developed for the field of SEM. Both a conventional fast scan (horizontal direction) and an unusual scan (vertical direction) are adopted for acquiring raw data consisting of many sub-images. These data are converted to a proper SEM image using digital image processing techniques. About sharpness of the image and reduction of charging effects, the SRS is compared with the conventional fast scan (with frame-averaging) and the conventional slow scan. Experimental results show the effectiveness of SRS images. By a successful combination of the proposed scanning method and low accelerating voltage (LV)-SEMs, it is expected that higher-quality SEM images can be more easily acquired by the considerable reduction of charging effects, while maintaining the resolution. SCANNING 36:327–333, 2014. © 2013 Wiley Periodicals, Inc.