Special raster scanning for reduction of charging effects in scanning electron microscopy

Authors

  • Kazuhiko Suzuki,

    1. Faculty of Informatics, Department of Information Design, Kogakuin University, Tokyo, Japan
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  • Eisaku Oho

    Corresponding author
    1. Faculty of Informatics, Department of Information Design, Kogakuin University, Tokyo, Japan
    • Address for reprints: Eisaku Oho, Faculty of Informatics, Department of Information Design, Kogakuin University, 2665-1 Nakano-machi, Hachioji, Tokyo 192-0015, Japan

      E-mail: oho@cc.kogakuin.ac.jp

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Summary

A special raster scanning (SRS) method for reduction of charging effects is developed for the field of SEM. Both a conventional fast scan (horizontal direction) and an unusual scan (vertical direction) are adopted for acquiring raw data consisting of many sub-images. These data are converted to a proper SEM image using digital image processing techniques. About sharpness of the image and reduction of charging effects, the SRS is compared with the conventional fast scan (with frame-averaging) and the conventional slow scan. Experimental results show the effectiveness of SRS images. By a successful combination of the proposed scanning method and low accelerating voltage (LV)-SEMs, it is expected that higher-quality SEM images can be more easily acquired by the considerable reduction of charging effects, while maintaining the resolution. SCANNING 36:327–333, 2014. © 2013 Wiley Periodicals, Inc.

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