Conflicts of interest: None.
Challenging material patterning: Fine lithography on coarse substrates
Article first published online: 29 OCT 2013
© 2013 Wiley Periodicals, Inc.
Volume 36, Issue 3, pages 362–367, May/June 2014
How to Cite
Gilles, S., Steppert, A.-K., Schaal, P. A., Barth, M., Niewoehner, L. and Simon, U. (2014), Challenging material patterning: Fine lithography on coarse substrates. Scanning, 36: 362–367. doi: 10.1002/sca.21126
- Issue published online: 4 JUN 2014
- Article first published online: 29 OCT 2013
- Manuscript Accepted: 2 OCT 2013
- Manuscript Revised: 23 SEP 2013
- Manuscript Received: 22 JUL 2013
- Deutsche Forschungsgemeinschaft. Grant Number: Si609/10-1
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