Conflicts of interest: None.
Challenging material patterning: Fine lithography on coarse substrates
Article first published online: 29 OCT 2013
© Wiley Periodicals, Inc.
How to Cite
Gilles, S., Steppert, A.-K., Schaal, P. A., Barth, M., Niewoehner, L. and Simon, U. (2013), Challenging material patterning: Fine lithography on coarse substrates. Scanning. doi: 10.1002/sca.21126
- Article first published online: 29 OCT 2013
- Manuscript Accepted: 2 OCT 2013
- Manuscript Revised: 23 SEP 2013
- Manuscript Received: 22 JUL 2013
- Deutsche Forschungsgemeinschaft. Grant Number: Si609/10-1
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