Paper presented at the 26th Symposium on Applied Surface Analysis. 15–18 June 2004, Pacific Northwest National Laboratory, Richland, Washington, USA.
Nitrogen analysis using energetic ion beams†
Article first published online: 22 MAR 2005
Copyright © 2005 John Wiley & Sons, Ltd.
Surface and Interface Analysis
Special Issue: Surface Analysis 2004. Papers presented at the 26th Symposium on Applied Surface Analysis, 15–18 June 2004, Pacific Northwest National Laboratory, Richland, Washington, USA
Volume 37, Issue 4, pages 374–378, April 2005
How to Cite
Jiang, W., Shutthanandan, V., Thevuthasan, S., Wang, C. M. and Weber, W. J. (2005), Nitrogen analysis using energetic ion beams. Surf. Interface Anal., 37: 374–378. doi: 10.1002/sia.1991
- Issue published online: 22 MAR 2005
- Article first published online: 22 MAR 2005
- Manuscript Accepted: 30 AUG 2004
- Manuscript Revised: 27 AUG 2004
- Manuscript Received: 16 JUN 2004
- US Department of Energy. Grant Number: DE-AC 06-76RLO 1830.
- nuclear elastic scattering;
- scattering cross-section;
- nitrogen analysis
As a special case of nuclear reaction analysis (NRA), nuclear elastic scattering analysis (or non-Rutherford scattering analysis) is one of the important methods in ion beam analysis and is the preferred technique to analyze light elements in a heavy matrix. Compared with nuclear reaction, nuclear scattering usually has cross-sections several orders of magnitude larger, which allows quantitative analysis of light elements in a quicker and more convenient manner. Similar to NRA, this method complements the analysis of widely used Rutherford backscattering spectrometry. In this study, the scattering cross-sections for 14N(p,p)14N and 14N(α,α)14N at a laboratory angle of 150° are measured over energy regions from 2.480 to 3.774 MeV using an amorphous film of Si3N4 on Si wafer. Examples for the analysis of lattice disorder on the nitrogen sublattice in Au2+-irradiated GaN single crystals will be demonstrated. Copyright © 2005 John Wiley & Sons, Ltd.