As a special case of nuclear reaction analysis (NRA), nuclear elastic scattering analysis (or non-Rutherford scattering analysis) is one of the important methods in ion beam analysis and is the preferred technique to analyze light elements in a heavy matrix. Compared with nuclear reaction, nuclear scattering usually has cross-sections several orders of magnitude larger, which allows quantitative analysis of light elements in a quicker and more convenient manner. Similar to NRA, this method complements the analysis of widely used Rutherford backscattering spectrometry. In this study, the scattering cross-sections for 14N(p,p)14N and 14N(α,α)14N at a laboratory angle of 150° are measured over energy regions from 2.480 to 3.774 MeV using an amorphous film of Si3N4 on Si wafer. Examples for the analysis of lattice disorder on the nitrogen sublattice in Au2+-irradiated GaN single crystals will be demonstrated. Copyright © 2005 John Wiley & Sons, Ltd.