Growth and SIMS study of d.c.-sputtered indium oxide films on silicon
Article first published online: 31 JAN 2005
Copyright © 2005 John Wiley & Sons, Ltd.
Surface and Interface Analysis
Volume 37, Issue 3, pages 281–287, March 2005
How to Cite
Malar, P., Mohanty, B. C., Balamurugan, A.K., Rajagopalan, S., Tyagi, A.K. and Kasiviswanathan, S. (2005), Growth and SIMS study of d.c.-sputtered indium oxide films on silicon. Surf. Interface Anal., 37: 281–287. doi: 10.1002/sia.2016
- Issue published online: 16 FEB 2005
- Article first published online: 31 JAN 2005
- Manuscript Accepted: 20 OCT 2004
- Manuscript Revised: 18 OCT 2004
- Manuscript Received: 9 JUN 2004
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