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SIMS Proceedings Papers
MCs+ depth profiling using cluster primary ions
Article first published online: 1 JUN 2010
DOI: 10.1002/sia.3465
Copyright © 2010 John Wiley & Sons, Ltd.
Issue
Surface and Interface Analysis
Special Issue: Proceedings of the Seventeenth International Conference on Secondary Ion Mass Spectrometry, SIMS XVII, Toronto, Ontario, Canada, September 14-18, 2009
Volume 43, Issue 1-2, pages 204–206, January - February 2011
Additional Information
How to Cite
Niehuis, E., Grehl, T., Kollmer, F., Moellers, R., Rading, D., Kersting, R. and Hagenhoff, B. (2011), MCs+ depth profiling using cluster primary ions. Surf. Interface Anal., 43: 204–206. doi: 10.1002/sia.3465
Publication History
- Issue published online: 19 JAN 2011
- Article first published online: 1 JUN 2010
- Manuscript Accepted: 14 MAR 2010
- Manuscript Revised: 10 MAR 2010
- Manuscript Received: 30 SEP 2009
- Abstract
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