Ultra-high performance multi-turn TOF-SIMS system with a femto-second laser for post-ionization: investigation of the performance in linear mode


  • This article was published online on 20 June 2010. Errors were subsequently identified. This notice is included in the online and print versions to indicate that both have been corrected [16 August 2010].


The performance of a newly developed TOF-SIMS System with a femtosecond laser postionization and a multiturn mass spectrometer was investigated in linear mode. This system would be very effective for analyzing valuable material such as space samples. By using postionization the secondary ion signals of Ag were increased (up to 100 times), compared with the conventional TOF-SIMS experiments. The laser power dependence on the signal intensities was also investigated and it was confirmed that the signal intensities reached specific values above the specific laser power. Lateral resolution of the elemental map was calculated to be about 40 nm. Copyright © 2010 John Wiley & Sons, Ltd.