Surface roughness plays an important role in affecting the adhesive force and friction force in microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS). One effective approach of reducing adhesion and friction of contacting interfaces is to create textured surface, which is especially beneficial for MEMS'/NEMS' production yield and product reliability. In this article, we present a convenient method to fabricate the nano-textured surfaces by self-assembling Au nanoparticles (NPs) on the silicon (100) surfaces. The nanoparticle-textured surfaces (NPTS) with different packing density and texture height were prepared by controlling the assembling time and the size of Au NPs. The morphologies and chemical states of NPTS were characterized by atomic force microscope (AFM), field emission scanning electron microscope, and XPS. The adhesion and friction on the NPTS were studied by AFM with colloidal tip. The results show that the nano-textured surfaces have effectively reduced adhesive force and friction force compared with the 3-aminopropyl trimethoxysilane self-assembled monolayer surfaces. The lowered adhesion and friction were attributed to the reduced real area of contact between NPTS and colloidal tip. The adhesion and friction of the NPTS are varying with the texture packing density and dependent on both the texture height and asperities spacing, which are related to the size and coverage ratio of NPs on surfaces. Copyright © 2011 John Wiley & Sons, Ltd.