Inter-laboratory comparison: Quantitative surface analysis of thin Fe-Ni alloy films
Article first published online: 27 MAY 2011
Copyright © 2011 John Wiley & Sons, Ltd.
Surface and Interface Analysis
Volume 44, Issue 2, pages 192–199, February 2012
How to Cite
Kim, K. J., Unger, W. E. S., Kim, J. W., Moon, D. W., Gross, T., Hodoroaba, V.-D., Schmidt, D., Wirth, T., Jordaan, W., van Staden, M., Prins, S., Zhang, L., Fujimoto, T., Song, X. P. and Wang, H. (2012), Inter-laboratory comparison: Quantitative surface analysis of thin Fe-Ni alloy films. Surf. Interface Anal., 44: 192–199. doi: 10.1002/sia.3795
- Issue published online: 18 JAN 2012
- Article first published online: 27 MAY 2011
- Manuscript Accepted: 4 MAY 2011
- Manuscript Revised: 28 APR 2011
- Manuscript Received: 26 MAR 2011
- Fe-Ni alloy;
- key comparison;
An international interlaboratory comparison of the measurement capabilities of four National Metrology Institutes (NMIs) and one Designated Institute (DI) in the determination of the chemical composition of thin Fe-Ni alloy films was conducted via a key comparison (K-67) of the Surface Analysis Working Group of the Consultative Committee for Amount of Substance. This comparison was made using XPS (four laboratories) and AES (one laboratory) measurements. The uncertainty budget of the measured chemical composition of a thin alloy film was dominated by the uncertainty of the certified composition of a reference specimen which had been determined by inductively coupled plasma mass spectrometry using the isotope dilution method. Pilot study P-98 showed that the quantification using relative sensitivity factors (RSFs) of Fe and Ni derived from an alloy reference sample results in much more accurate result in comparison to an approach using RSFs derived from pure Fe and Ni films. The individual expanded uncertainties of the participants in the K-67 comparison were found to be between 2.88 and 3.40 atomic %. The uncertainty of the key comparison reference value (KCRV) calculated from individual standard deviations and a coverage factor (k) of 2 was 1.23 atomic %. Copyright © 2011 John Wiley & Sons, Ltd.