A surface-ionization method of detection of a neutral component of indium sputtering under bombardment by cluster ions


U. Kh. Rasulev, Arifov Institute of Electronics, 100125 Tashkent, Uzbekistan.

E-mail: rasulev@aie.uz


A surface-ionization method of measuring the total sputtering yield has been developed. The indium sputtering by Bim+ (m = 1–7) cluster ions with energy 2–10 keV has been studied. A non-additive increase in the total sputtering yield with the raise in the number of atoms in cluster projectiles has been found. Copyright © 2012 John Wiley & Sons, Ltd.