SIMS proceedings paper
Highly sensitive analysis of surface contaminants by Ar gas cluster SIMS
Version of Record online: 10 MAY 2012
Copyright © 2012 John Wiley & Sons, Ltd.
Surface and Interface Analysis
Special Issue: Proceedings of the Eighteenth International Conference on Secondary Ion Mass Spectrometry, SIMS XVIII, Riva Del Garda, Trento, Italy, September 18 - 23, 2011
Volume 45, Issue 1, pages 143–146, January 2013
How to Cite
Moritani, K., Tanaka, M., Inui, N. and Mochiji, K. (2013), Highly sensitive analysis of surface contaminants by Ar gas cluster SIMS. Surf. Interface Anal., 45: 143–146. doi: 10.1002/sia.5008
- Issue online: 18 DEC 2012
- Version of Record online: 10 MAY 2012
- Manuscript Accepted: 21 MAR 2012
- Manuscript Revised: 23 FEB 2012
- Manuscript Received: 8 OCT 2011
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