SIMS proceedings paper
Computer simulation of layer-by-layer sputtering at grazing low-energy ion-surface interactions
Article first published online: 22 JUN 2012
Copyright © 2012 John Wiley & Sons, Ltd.
Surface and Interface Analysis
Special Issue: Proceedings of the Eighteenth International Conference on Secondary Ion Mass Spectrometry, SIMS XVIII, Riva Del Garda, Trento, Italy, September 18 - 23, 2011
Volume 45, Issue 1, pages 83–86, January 2013
How to Cite
Umarov, F. F. and Dzhurakhalov, A. A. (2013), Computer simulation of layer-by-layer sputtering at grazing low-energy ion-surface interactions. Surf. Interface Anal., 45: 83–86. doi: 10.1002/sia.5086
- Issue published online: 18 DEC 2012
- Article first published online: 22 JUN 2012
- Manuscript Accepted: 29 MAY 2012
- Manuscript Revised: 9 APR 2012
- Manuscript Received: 5 OCT 2011
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