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Keywords:

  • silicon-containing diamond-like-carbon films;
  • high-temperature tribology;
  • thermal stability

The tribological properties of Silicon-containing diamond-like-carbon (Si-DLC) films, deposited by magnetron sputtering Si target in methane/argon atmosphere, were studied in comparison with diamond-like-carbon (DLC) films. The DLC films disappeared because of the oxidation in the air at 500 °C, whereas the Si-DLC films still remained, implying that the addition of Si improved significantly the thermal stability of DLC films. Retarded hydrogen release from DLC film at high temperature and silicon oxide on the surface might have contributed to lower friction coefficient of the Si-DLC films both after annealing treatment and in situ high-temperature environment. Copyright © 2012 John Wiley & Sons, Ltd.