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Conductivity of ITO film amplified by multi-step ion beam-treatment on PET layers at room temperature

Authors

  • Phil Kook Son,

    1. Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University, Yongin, Gyeonggi-do, Republic of Korea
    2. Regional Innovation Center-Components and Materials for Information Display, Kyung Hee University, Yongin, Gyeonggi-do, Republic of Korea
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  • Suk-Won Choi,

    1. Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University, Yongin, Gyeonggi-do, Republic of Korea
    2. Regional Innovation Center-Components and Materials for Information Display, Kyung Hee University, Yongin, Gyeonggi-do, Republic of Korea
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  • Sung Soo Kim,

    1. Department of Chemical Engineering, Kyung Hee University, Yongin, Gyeonggi-do, Republic of Korea
    2. Regional Innovation Center-Components and Materials for Information Display, Kyung Hee University, Yongin, Gyeonggi-do, Republic of Korea
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  • Jin Seog Gwag

    Corresponding author
    • Department of Physics, Yeungnam University, Gyeongsan, Republic of Korea
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Jin Seog Gwagm, Department of Physics, Yeungnam University, Gyeongsan 712–749, Republic of Korea

E-mail: sweat3000@ynu.ac.kr

Abstract

In this paper, we investigate poly-crystal indium tin oxide (ITO) film produced by a multi-step ion beam treatment on polyethylene terephthalate (PET) at room temperature. In the process of ITO film deposition by a sputtering method, we perform an ion beam treatment after some quantity of ITO deposition is complete, and this process is carried out repeatedly until the required film thickness is achieved. X-ray diffraction indicates that the ITO film deposited by our multi-step ion beam treatment has an almost poly-crystal structure with a morsel of amorphous structure in the PET layers. As a supplementary measurement, a contact angle method shows that the poly-crystal structure is due to a surface charge effect. Consequently, the electrical conductivity of the ITO film (resistivity measurement error bar < 0.7%) with the multi-step ion beam treatment is eight times higher than that of single-treated ITO film, due to this poly-crystal structure. Copyright © 2012 John Wiley & Sons, Ltd.

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