Origin of differences between MCs+ and MCs2+ SIMS depth profiles

Authors


Takashi Miyamoto, Surface Analysis Laboratory, Toray Research Center, Inc.

E-mail: Takashi_Miyamoto@trc.toray.co.jp,

Abstract

For secondary ion mass spectrometry of highly electronegative elements, the MCs2+ method provides greater sensitivity but may sometimes afford a different depth profile than the conventional MCs+ method for the same sample. Here, we report the difference system not only from the electronegativity of the elements but also from the electronegativity of the matrix. Copyright © 2012 John Wiley & Sons, Ltd.

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