Phase formation and impurity effects in Ar+ ion irradiated Mo/Si thin film bilayer system
Version of Record online: 6 DEC 2012
Copyright © 2012 John Wiley & Sons, Ltd.
Surface and Interface Analysis
Volume 45, Issue 5, pages 895–900, May 2013
How to Cite
Singh, Ch. K., Ilango, S., Dash, S. and Tyagi, A. K. (2013), Phase formation and impurity effects in Ar+ ion irradiated Mo/Si thin film bilayer system. Surf. Interface Anal., 45: 895–900. doi: 10.1002/sia.5178
- Issue online: 15 APR 2013
- Version of Record online: 6 DEC 2012
- Manuscript Accepted: 17 OCT 2012
- Manuscript Revised: 28 AUG 2012
- Manuscript Received: 30 MAY 2012
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