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Summary of ISO/TC 201 Standard: ISO 16129-:2012 – Surface chemical analysis — Procedures to assess the day-to-day performance of an X-ray photoelectron spectrometer


Correspondence to: J. Wolstenholme, Thermo Fisher Scientific, Unit 24, The Birches Industrial Estate, Imberhorne Lane, East Grinstead, West Sussex, RH19 1UB, UK.



This International Standard is designed to allow the user to simply assess, on a routine basis, several key parameters of an X-ray photoelectron spectrometer. It is not intended to provide an exhaustive performance check but instead provides a rapid set of tests that may be conducted frequently. Aspects of instrument behaviour covered by this document include the vacuum, measurements of spectra of conductive or non-conductive samples and the current state of the X-ray source. Other important aspects of the instrument performance (e.g. lateral resolution) fall outside the scope of this standard. The standard is intended for use with commercial X-ray photoelectron spectrometers equipped with a monochromated Al Kα X-ray source or with a unmonochromated Al or Mg Kα X-ray source. Copyright © 2012 John Wiley & Sons, Ltd.