Quantification of AES depth profiling data of polycrystalline Al films with Gaussian and non-Gaussian surface height distributions
Article first published online: 12 FEB 2013
Copyright © 2013 John Wiley & Sons, Ltd.
Surface and Interface Analysis
Volume 45, Issue 7, pages 1148–1151, July 2013
How to Cite
Jian, W., Liu, Y., Wang, X. Y., Rao, S. P., Hofmann, S. and Wang, J. Y. (2013), Quantification of AES depth profiling data of polycrystalline Al films with Gaussian and non-Gaussian surface height distributions. Surf. Interface Anal., 45: 1148–1151. doi: 10.1002/sia.5241
- Issue published online: 13 JUN 2013
- Article first published online: 12 FEB 2013
- Manuscript Revised: 18 JAN 2013
- Manuscript Accepted: 18 JAN 2013
- Manuscript Received: 2 OCT 2012
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