The analysis of doping element distribution in optical fiber cross sections requires a sensitive high spatial resolution technique. We demonstrate that a compact orthogonal Time-of-Flight (TOF) mass spectrometer attached to a multitechnique FIB-SEM-EDX system can be used to analyze cross sections of as manufactured optical fibers. By performing quantitative Energy Dispersive X-Ray (EDX) analysis of the optical preform, from which the fibers were drawn, we obtained conversion factors, which enabled the quantification of the Focused Ion Beam (FIB) SIMS profiles of the fiber cross sections. Copyright © 2014 John Wiley & Sons, Ltd.
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