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Study on the anti-reflection and structure evolution of hydrogenated amorphous carbon grown by plasma chemical vapor deposition

Authors

  • Jing Shi,

    1. School of Mechanic and Electronic Engineering, Lanzhou Jiaotong University, Lanzhou, China
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  • Zhongrong Geng,

    1. School of Mechanic and Electronic Engineering, Lanzhou Jiaotong University, Lanzhou, China
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  • Junyan Zhang,

    Corresponding author
    1. State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou, China
    • Correspondence to: Junyan Zhang, State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China. E-mail: zhangjunyan@lzb.ac.cn

      Chengbing Wang, National Engineering Research Center for Technology and Equipment of Green Coating, Lanzhou Jiaotong University, Lanzhou 730070, China.

      E-mail: wangchengbing@gmail.com

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  • Chengbing Wang

    Corresponding author
    1. National Engineering Research Center for Technology and Equipment of Green Coating, Lanzhou Jiaotong University, Lanzhou, China
    • Correspondence to: Junyan Zhang, State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China. E-mail: zhangjunyan@lzb.ac.cn

      Chengbing Wang, National Engineering Research Center for Technology and Equipment of Green Coating, Lanzhou Jiaotong University, Lanzhou 730070, China.

      E-mail: wangchengbing@gmail.com

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Abstract

In this work, the interrelation between the anti-reflective property and the component, especially the sp2 content, was studied. The results showed that the refraction index n increased from 2.2 to 3.3 with the direct current negative bias increasing. The reflection result R successful fall by 11.9% because of the existence of hydrogenated amorphous carbon anti-reflective coatings. Both the refraction index and reflectivity decreasing correspond to a more graphitic microstructure character. Moreover, the optical property evolution of the films was explained by the chemical vapor deposition mechanism based on the ion sub-plantation model and two-phase model. Copyright © 2014 John Wiley & Sons, Ltd.

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