Get access

Si useful yields measured in Si, SiC, Si3N4 and SiO2: comparison between the Storing Matter technique and SIMS



The storing matter technique was developed to tackle quantification issues encountered in SIMS due to matrix effects. Here, we demonstrate the quantitative capabilities of the technique by comparing the useful yield for Si in different matrices exhibiting matrix effects in conventional SIMS analysis. Additionally, the effect of the collector material (Ag, Au, Cu and Ta) on the storing matter useful yield is investigated. Copyright © 2014 John Wiley & Sons, Ltd.

Get access to the full text of this article