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Surface and Interface Analysis

© John Wiley & Sons, Ltd.

Cover image for Surface and Interface Analysis

Special Issue: Proceedings of NIST workshop on Modeling Electron Transport for Applications in Electron and X-Ray Analysis and Metrology (November 8–10, 2004)

November 2005

Volume 37, Issue 11

Pages 823–1074

Issue edited by: Cedric J Powell

  1. Preface

    1. Top of page
    2. Preface
    3. Research Articles
    1. Preface for special issue of Surface and Interface Analysis with the proceedings of the NIST workshop on ‘Modeling electron transport for applications in electron and X-ray analysis and metrology’ (page 823)

      C. J. Powell and D. E. Newbury

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2100

  2. Research Articles

    1. Top of page
    2. Preface
    3. Research Articles
    1. Cross sections for electron interactions in condensed matter (pages 824–832)

      J. M. Fernández-Varea, X. Llovet and F. Salvat

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2101

    2. Experimental determination of electron inelastic mean free paths in 13 elemental solids in the 50 to 5000 eV energy range by elastic-peak electron spectroscopy (pages 833–845)

      S. Tanuma, T. Shiratori, T. Kimura, K. Goto, S. Ichimura and C. J. Powell

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2102

    3. Simulation of electron spectra for surface analysis using the partial-intensity approach (PIA) (pages 846–860)

      Wolfgang S. M. Werner

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2103

    4. Monte Carlo strategies for simulations of electron backscattering from surfaces (pages 861–874)

      A. Jablonski, C. J. Powell and S. Tanuma

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2104

    5. X-ray microanalysis of real materials using Monte Carlo simulations (pages 875–886)

      Raynald Gauvin

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2105

    6. Monte Carlo modeling of electron-excited X-ray emission from bulk materials and thin-film/substrate systems (pages 887–894)

      T. Nagatomi

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2106

    7. A new examination of secondary electron yield data (pages 895–900)

      Yinghong Lin and David C. Joy

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2107

    8. Why is it possible to detect doped regions of semiconductors in low voltage SEM: a review and update (pages 901–911)

      M. El-Gomati, F. Zaggout, H. Jayacody, S. Tear and K. Wilson

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2108

    9. Application of Monte Carlo simulation to SEM image contrast of complex structures (pages 912–918)

      Z. J. Ding and H. M. Li

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2109

    10. A flexible and efficient approach to E-beam proximity effect correction—PYRAMID (pages 919–926)

      Soo-Young Lee

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2110

    11. Shape-from-shading and simulation of SEM images using surface slope and curvature (pages 927–938)

      Adam Seeger and Horst Haussecker

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2111

    12. Modeling of imaging processes in the low-vacuum SEM (pages 939–941)

      Bradley L. Thiel

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2112

    13. Use of Monte Carlo models in the development and validation of CD operators (pages 942–950)

      Carl Georg Frase and Wolfgang Häßler-Grohne

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2113

    14. Scanning electron microscope dimensional metrology using a model-based library (pages 951–958)

      J. S. Villarrubia, A. E. Vladár and M. T. Postek

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2087

    15. Model-based CD–SEM metrology at low and ultralow landing energies: implementation and results for advanced IC manufacturing (pages 959–965)

      Dmitry V. Gorelikov, Jason Remillard, Neal T. Sullivan and Mark Davidson

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2088

    16. An overview of the BEB method for electron-impact ionization of atoms and molecules (pages 966–968)

      Philip M. Stone and Yong-Ki Kim

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2089

    17. Total ionization cross sections of Cl and Cl2 by electron impact (pages 969–972)

      M. Asgar Ali and Yong-Ki Kim

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2090

    18. Performance of binary-encounter-Bethe (BEB) theory for electron-impact ionization cross sections of molecules containing heavy elements (Z > 10) (pages 973–977)

      Gregory E. Scott and Karl K. Irikura

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2091

    19. Calculations of stopping powers of 100 eV to 30 keV electrons in 10 elemental solids (pages 978–988)

      S. Tanuma, C. J. Powell and D. R. Penn

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2092

    20. Quantification of discrete oxide and sulfur layers on sulfur-passivated InAs by XPS (pages 989–997)

      D. Y. Petrovykh, J. M. Sullivan and L. J. Whitman

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2095

    21. Experimental and model study of the Rh/Al system by means of EPES (pages 998–1005)

      J. Pavluch, L. Zommer, Y. Polyak, Z. Pekárek, A. Jablonski, B. Lesiak, T. Hrnčíř and V. Nehasil

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2094

    22. A new Monte Carlo application for complex sample geometries (pages 1006–1011)

      Nicholas W. M. Ritchie

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2093

    23. Monte Carlo simulation of Nb Kα secondary fluorescence in EPMA: comparison of PENELOPE simulations with experimental results (pages 1012–1016)

      John H. Fournelle, Sungtae Kim and John H. Perepezko

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2114

    24. EBSD geometry in the SEM: simulation and representation (pages 1017–1020)

      Andrew Deal, Xiaodong Tao and Alwyn Eades

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2115

    25. Kinetic Monte Carlo simulation of monolayer gold film growth on a graphite substrate (pages 1021–1026)

      C. H. Claassens, J. J. Terblans, M. J. H. Hoffman and H. C. Swart

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2116

    26. A Monte Carlo model utilizing local chemical potentials for simulating segregation and diffusion. Part 1—theory (pages 1027–1030)

      H. D. Joubert, H. C. Swart and J. J. Terblans

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2117

    27. A Monte Carlo model utilizing local chemical potentials for simulating segregation and diffusion. Part 2–implementation (pages 1031–1034)

      H. D. Joubert, H. C. Swart and J. J. Terblans

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2118

    28. Determination of the electron inelastic mean free path in solids from the elastic electron backscattering intensity (pages 1035–1044)

      A. Jablonski

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2119

    29. You have free access to this content
      Simulation of electron-excited X-ray spectra with NIST–NIH Desktop Spectrum Analyzer (DTSA) (pages 1045–1053)

      Dale E. Newbury and Robert L. Myklebust

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2086

    30. Monte Carlo simulation of X-ray emission using the general-purpose code PENELOPE (pages 1054–1058)

      X. Llovet, J. M. Fernández-Varea, J. Sempau and F. Salvat

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2096

    31. Simulation of electron spectra for surface analysis (SESSA): a novel software tool for quantitative Auger-electron spectroscopy and X-ray photoelectron spectroscopy (pages 1059–1067)

      Werner Smekal, Wolfgang S. M. Werner and Cedric J. Powell

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2097

    32. NIST databases with electron elastic-scattering cross sections, inelastic mean free paths, and effective attenuation lengths (pages 1068–1071)

      C. J. Powell, A. Jablonski and F. Salvat

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2098

    33. Summary of the panel discussion on opportunities and needs (pages 1072–1074)

      C. J. Powell

      Article first published online: 31 OCT 2005 | DOI: 10.1002/sia.2099

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