This work was supported by the National Natural Science Foundation of China (NSFC 20573002, 50521201), the Ministry of Science and Technology of China (2001CB6105) and the FOKYING TUNG Education Foundation (94012). We are grateful to Prof. Jing Kong (MIT) for useful discussions.
Cicada Wings: A Stamp from Nature for Nanoimprint Lithography†
Article first published online: 6 OCT 2006
Copyright © 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Volume 2, Issue 12, pages 1440–1443, December 2006
How to Cite
Zhang, G., Zhang, J., Xie, G., Liu, Z. and Shao, H. (2006), Cicada Wings: A Stamp from Nature for Nanoimprint Lithography. Small, 2: 1440–1443. doi: 10.1002/smll.200600255
- Issue published online: 27 OCT 2006
- Article first published online: 6 OCT 2006
- Manuscript Received: 7 MAY 2006
- cicada wings;
- imprint lithography;
- reactive ion etching
Winging it: The natural micro- and nanostructures that exist on the wings of cicadas (see image) are used as a new type of nanoimprinting lithography (NIL) stamp. NIL is used to fabricate nanowell arrays and the structures are transferred to a silicon substrate by reactive ion etching. Patterned PMMA (poly(methyl methacrylate)) is also used as a mold to fabricate hexagonal gold pillar arrays that mimick structures on cicada wings. This work demonstrates the use of natural nanostructures as a much cheaper NIL method as cicada wings are abundant and easy to obtain.