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Cicada Wings: A Stamp from Nature for Nanoimprint Lithography

Authors

  • Guoming Zhang,

    1. Center for Nanoscale Science and Technology (CNST), Beijing National Laboratory for Molecular Sciences (BNLMS), State Key Laboratory for Structural Chemistry of Unstable and Stable Species, Key Laboratory for the Physics and Chemistry of Nanodevices, College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, P.R. China, Fax: (+86) 106-275-7157
    2. Nanotechnology Industrialization Base of China (NIBC), Tianjin 300457, P. R. China
    3. Capital Normal University, Beijing 100037, P. R. China
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  • Jin Zhang Prof.,

    1. Center for Nanoscale Science and Technology (CNST), Beijing National Laboratory for Molecular Sciences (BNLMS), State Key Laboratory for Structural Chemistry of Unstable and Stable Species, Key Laboratory for the Physics and Chemistry of Nanodevices, College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, P.R. China, Fax: (+86) 106-275-7157
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  • Guoyong Xie Dr.,

    1. Center for Nanoscale Science and Technology (CNST), Beijing National Laboratory for Molecular Sciences (BNLMS), State Key Laboratory for Structural Chemistry of Unstable and Stable Species, Key Laboratory for the Physics and Chemistry of Nanodevices, College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, P.R. China, Fax: (+86) 106-275-7157
    2. Nanotechnology Industrialization Base of China (NIBC), Tianjin 300457, P. R. China
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  • Zhongfan Liu Prof.,

    1. Center for Nanoscale Science and Technology (CNST), Beijing National Laboratory for Molecular Sciences (BNLMS), State Key Laboratory for Structural Chemistry of Unstable and Stable Species, Key Laboratory for the Physics and Chemistry of Nanodevices, College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, P.R. China, Fax: (+86) 106-275-7157
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  • Huibo Shao Prof.

    1. Capital Normal University, Beijing 100037, P. R. China
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  • This work was supported by the National Natural Science Foundation of China (NSFC 20573002, 50521201), the Ministry of Science and Technology of China (2001CB6105) and the FOKYING TUNG Education Foundation (94012). We are grateful to Prof. Jing Kong (MIT) for useful discussions.

Abstract

original image

Winging it: The natural micro- and nanostructures that exist on the wings of cicadas (see image) are used as a new type of nanoimprinting lithography (NIL) stamp. NIL is used to fabricate nanowell arrays and the structures are transferred to a silicon substrate by reactive ion etching. Patterned PMMA (poly(methyl methacrylate)) is also used as a mold to fabricate hexagonal gold pillar arrays that mimick structures on cicada wings. This work demonstrates the use of natural nanostructures as a much cheaper NIL method as cicada wings are abundant and easy to obtain.

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