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Biomimetic Antireflective Si Nanopillar Arrays

Authors

  • Hongbo Xu,

    1. State Key Laboratory of Supramolecular Structure and Materials College of Chemistry, Jilin University Changchun 130012 (P. R. China)
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  • Nan Lu,

    Corresponding author
    1. State Key Laboratory of Supramolecular Structure and Materials College of Chemistry, Jilin University Changchun 130012 (P. R. China)
    • State Key Laboratory of Supramolecular Structure and Materials College of Chemistry, Jilin University Changchun 130012 (P. R. China).
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  • Dianpeng Qi,

    1. State Key Laboratory of Supramolecular Structure and Materials College of Chemistry, Jilin University Changchun 130012 (P. R. China)
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  • Juanyuan Hao,

    1. State Key Laboratory of Supramolecular Structure and Materials College of Chemistry, Jilin University Changchun 130012 (P. R. China)
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  • Liguo Gao,

    1. State Key Laboratory of Supramolecular Structure and Materials College of Chemistry, Jilin University Changchun 130012 (P. R. China)
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  • Bo Zhang,

    1. State Key Laboratory of Supramolecular Structure and Materials College of Chemistry, Jilin University Changchun 130012 (P. R. China)
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  • Lifeng Chi

    Corresponding author
    1. State Key Laboratory of Supramolecular Structure and Materials College of Chemistry, Jilin University Changchun 130012 (P. R. China)
    2. Physikalisches Institut and Center for Nanotechnology (CeNTech) Westfälische Wilhelms-Universität Münster 48149 Münster (Germany)
    • State Key Laboratory of Supramolecular Structure and Materials College of Chemistry, Jilin University Changchun 130012 (P. R. China).
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  • This work was supported by the National Natural Science Foundation of China (NSFC 20773052, 20373019), the Program for New Century Excellent Talents in University of China, the National Basic Research Program (2007CB808003), and the Program for Changjiang Scholars and Innovative Research Team in University (PCSIRT Grant No. IRT0422). We would like to thank Dr. Sen Wang for his assistance in this work.

Abstract

original image

Biomimetic antireflective Si nanopillar arrays are created using self-assembled polymer-sphere monolayers as etching masks (see image). These tapered Si nanopillar arrays can greatly suppress the reflectivity of Si. This method provides a facile approach for producing antireflection (AR) surfaces on large areas with low cost and high throughput.

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