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Keywords:

  • hydrogels;
  • imprinting;
  • lithography;
  • patterning;
  • topography

Abstract

Micropatterned hydrogel stamps soaked in appropriate chemical etchants can imprint various types of micro- and nanoarchitectures into metals, conductive oxides, semiconductors, glasses, and crystals. Localized etching is mediated by a reaction-diffusion process initiated from the stamp microfeatures and gives lateral resolution down to approximately 300 nm. The method is well suited for the rapid prototyping of small-scale devices including multilevel microfluidic systems and curvilinear optical elements.