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Keywords:

  • epitaxy;
  • graphene;
  • monolayers;
  • self-assembly;
  • surface analysis

Graphical Abstract

Thumbnail image of graphical abstract

The formation of highly oriented graphene superstructures on silicon-based epitaxial Rh(111) films is investigated for different CxHyOz species (see image). A detailed study of the graphene formation from selected carbon sources as precursors indicates that dicarbon species are responsible for the graphene layer formation. This new approach provides easy access to high-quality graphene films on transition-metal layers grown on 4-in. silicon wafers.

Abstract

The selective formation of large-scale graphene layers on a Rh-YSZ-Si(111) multilayer substrate by a surface-induced chemical growth mechanism is investigated using low-energy electron diffraction, X-ray photoelectron spectroscopy, X-ray photoelectron diffraction, and scanning tunneling microscopy. It is shown that well-ordered graphene layers can be grown using simple and controllable procedures. In addition, temperature-dependent experiments provide insight into the details of the growth mechanisms. A comparison of different precursors shows that a mobile dicarbon species (e.g., C2H2 or C2) acts as a common intermediate for graphene formation. These new approaches offer scalable methods for the large-scale production of high-quality graphene layers on silicon-based multilayer substrates.