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Preventing Nanoscale Wear of Atomic Force Microscopy Tips Through the Use of Monolithic Ultrananocrystalline Diamond Probes

  1. J. Liu1,
  2. D. S. Grierson1,
  3. N. Moldovan3,
  4. J. Notbohm1,5,
  5. S. Li1,6,
  6. P. Jaroenapibal2,7,
  7. S. D. O'Connor1,
  8. A. V. Sumant4,
  9. N. Neelakantan3,
  10. J. A. Carlisle3,
  11. K. T. Turner1,*,
  12. R. W. Carpick2,*

Article first published online: 19 MAY 2010

DOI: 10.1002/smll.200901673

Issue

Small

Small

Volume 6, Issue 10, pages 1140–1149, May 21 2010

Additional Information

How to Cite

Liu, J., Grierson, D. S., Moldovan, N., Notbohm, J., Li, S., Jaroenapibal, P., O'Connor, S. D., Sumant, A. V., Neelakantan, N., Carlisle, J. A., Turner, K. T. and Carpick, R. W. (2010), Preventing Nanoscale Wear of Atomic Force Microscopy Tips Through the Use of Monolithic Ultrananocrystalline Diamond Probes. Small, 6: 1140–1149. doi: 10.1002/smll.200901673

Author Information

  1. 1

    University of Wisconsin–Madison Madison, WI 53706 (USA)

  2. 2

    University of Pennsylvania Philadelphia, PA 19104 (USA)

  3. 3

    Advanced Diamond Technologies Romeoville, IL 60446 (USA)

  4. 4

    Center for Nanoscale Materials Argonne National Laboratory Argonne, IL 60439 (USA)

  5. 5

    Current address: California Institute of Technology Pasadena, CA (USA)

  6. 6

    Current address: nLight Vancouver, WA (USA)

  7. 7

    Current address: Industrial Engineering Department Khon Kaen University (Thailand)

*University of Wisconsin–Madison Madison, WI 53706 (USA)

Publication History

  1. Issue published online: 19 MAY 2010
  2. Article first published online: 19 MAY 2010
  3. Manuscript Revised: 7 MAR 2010
  4. Manuscript Received: 6 SEP 2009

Funded by

  • University of Pennsylvania. Grant Numbers: #0638030, #0823002
  • National Science Foundation. Grant Number: CMMI-0826076

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Keywords:

  • atomic force microscopy;
  • diamond;
  • mechanical properties;
  • nanocrystalline materials;
  • tribology

Abstract

Nanoscale wear is a key limitation of conventional atomic force microscopy (AFM) probes that results in decreased resolution, accuracy, and reproducibility in probe-based imaging, writing, measurement, and nanomanufacturing applications. Diamond is potentially an ideal probe material due to its unrivaled hardness and stiffness, its low friction and wear, and its chemical inertness. However, the manufacture of monolithic diamond probes with consistently shaped small-radius tips has not been previously achieved. The first wafer-level fabrication of monolithic ultrananocrystalline diamond (UNCD) probes with <5-nm grain sizes and smooth tips with radii of 30–40 nm is reported, which are obtained through a combination of microfabrication and hot-filament chemical vapor deposition. Their nanoscale wear resistance under contact-mode scanning conditions is compared with that of conventional silicon nitride (SiNx) probes of similar geometry at two different relative humidity levels (≈15 and ≈70%). While SiNx probes exhibit significant wear that further increases with humidity, UNCD probes show little measurable wear. The only significant degradation of the UNCD probes observed in one case is associated with removal of the initial seed layer of the UNCD film. The results show the potential of a new material for AFM probes and demonstrate a systematic approach to studying wear at the nanoscale.

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