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Keywords:

  • actuation;
  • nanoelectromechanical systems;
  • nanowires;
  • silicon;
  • switches
Thumbnail image of graphical abstract

A nanoelectromechanical switch consists of two landing electrodes on either side of a movable silicon nanowire, separated by a nanoscale air gap. The bistable mechanical state of the nanowire determines an on/off state, which is sensed by measuring the contact resistance. The n-type semiconductor electrodes and p-type nanowire form a p–n junction diode at the cross-point.