Nanowire Mechanical Switch with a Built-In Diode


  • This research was supported by the Nano R&D program through the National Research Foundation of Korea funded by the Ministry of Education, Science, and Technology (No. 2009-0082583), and a National Research Foundation of Korea grant funded by the Korean government (No. 2009-0083079)


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A nanoelectromechanical switch consists of two landing electrodes on either side of a movable silicon nanowire, separated by a nanoscale air gap. The bistable mechanical state of the nanowire determines an on/off state, which is sensed by measuring the contact resistance. The n-type semiconductor electrodes and p-type nanowire form a p–n junction diode at the cross-point.