Continuous Measurement of Atomic Force Microscope Tip Wear by Contact Resonance Force Microscopy

Authors

  • Jason P. Killgore,

    Corresponding author
    1. Materials Reliability Division, National Institute of Standards and Technology, 325 Broadway, Boulder, CO 80305, USA
    • Materials Reliability Division, National Institute of Standards and Technology, 325 Broadway, Boulder, CO 80305, USA.
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  • Roy H. Geiss,

    1. Materials Reliability Division, National Institute of Standards and Technology, 325 Broadway, Boulder, CO 80305, USA
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  • Donna C. Hurley

    1. Materials Reliability Division, National Institute of Standards and Technology, 325 Broadway, Boulder, CO 80305, USA
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Abstract

original image

Contact resonance force microscopy is used during AFM scanning to resolve instantaneous and progressive nanometer-scale changes in the contact radius between an AFM tip and a silicon substrate. High-resolution quantitative measurements of contact radius reveal real-time information on wear rate, fracture, and tip-symmetry.

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