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Keywords:

  • bulk diffusion;
  • metal catalyst;
  • microwires;
  • surface precipitation;
  • vapor–liquid–solid method
Thumbnail image of graphical abstract

Metals diffused into bulk silicon can be manipulated to out-diffuse and precipitate in microsized droplets at surfaces, allowing for subsequent silicon wire growth. This technique allows for both high-throughput and precision in the size and positions of metal droplets on the silicon surface.