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Keywords:

  • photolithography;
  • microfabrication;
  • nanofabrication;
  • microfluidics;
  • soft lithography
Thumbnail image of graphical abstract

A portable and compact photolithography system based on a solid-state light source of UV light-emitting diodes (LEDs) is described. Solid-state photolithography can achieve high-quality patterns over a wide range of length scales at a fraction of the cost of contact mask aligners. 2D nanoscale and 1D microscale patterns can easily be created.