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A Portable, Benchtop Photolithography System Based on a Solid-State Light Source

Authors

  • Mark D. Huntington,

    1. Department of Materials Science and Engineering, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208
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  • Teri W. Odom

    Corresponding author
    1. Department of Materials Science and Engineering, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208
    2. Department of Chemistry, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208
    • Department of Materials Science and Engineering, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208.
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Abstract

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A portable and compact photolithography system based on a solid-state light source of UV light-emitting diodes (LEDs) is described. Solid-state photolithography can achieve high-quality patterns over a wide range of length scales at a fraction of the cost of contact mask aligners. 2D nanoscale and 1D microscale patterns can easily be created.

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