A Portable, Benchtop Photolithography System Based on a Solid-State Light Source
Article first published online: 8 SEP 2011
Copyright © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Volume 7, Issue 22, pages 3144–3147, November 18, 2011
How to Cite
Huntington, M. D. and Odom, T. W. (2011), A Portable, Benchtop Photolithography System Based on a Solid-State Light Source. Small, 7: 3144–3147. doi: 10.1002/smll.201101209
- Issue published online: 14 NOV 2011
- Article first published online: 8 SEP 2011
- Manuscript Revised: 6 AUG 2011
- Manuscript Received: 17 JUN 2011
Detailed facts of importance to specialist readers are published as ”Supporting Information”. Such documents are peer-reviewed, but not copy-edited or typeset. They are made available as submitted by the authors.
Please note: Wiley Blackwell is not responsible for the content or functionality of any supporting information supplied by the authors. Any queries (other than missing content) should be directed to the corresponding author for the article.