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Keywords:

  • nanofabrication;
  • nanofluidics;
  • electron-beam-induced etching;
  • electron beam lithography;
  • high-modulus poly(dimethylsiloxane)
Thumbnail image of graphical abstract

In-plane nanofluidic channels with 3D topography are fabricated. Nanochannel masters are written by electron beam lithography in SU-8 resist and shaped by electron-beam-induced etching (EBIE) with water as the precursor gas. Nanofunnel replicas cast from unmodified and EBIE-modified masters show that the funnel tip dimensions decrease from a 150-nm depth and 80-nm width to a 70-nm depth and 40-nm width.