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Communication
3D Nanofluidic Channels Shaped by Electron-Beam-Induced Etching
Article first published online: 14 MAR 2012
DOI: 10.1002/smll.201102240
Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Additional Information
How to Cite
Perry, J. M., Harms, Z. D. and Jacobson, S. C. (2012), 3D Nanofluidic Channels Shaped by Electron-Beam-Induced Etching. Small, 8: 1521–1526. doi: 10.1002/smll.201102240
Publication History
- Issue published online: 14 MAY 2012
- Article first published online: 14 MAR 2012
- Manuscript Revised: 6 DEC 2011
- Manuscript Received: 24 OCT 2011
Keywords:
- nanofabrication;
- nanofluidics;
- electron-beam-induced etching;
- electron beam lithography;
- high-modulus poly(dimethylsiloxane)
In-plane nanofluidic channels with 3D topography are fabricated. Nanochannel masters are written by electron beam lithography in SU-8 resist and shaped by electron-beam-induced etching (EBIE) with water as the precursor gas. Nanofunnel replicas cast from unmodified and EBIE-modified masters show that the funnel tip dimensions decrease from a 150-nm depth and 80-nm width to a 70-nm depth and 40-nm width.