3D Nanofluidic Channels Shaped by Electron-Beam-Induced Etching
Article first published online: 14 MAR 2012
Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Volume 8, Issue 10, pages 1521–1526, May 21, 2012
How to Cite
Perry, J. M., Harms, Z. D. and Jacobson, S. C. (2012), 3D Nanofluidic Channels Shaped by Electron-Beam-Induced Etching. Small, 8: 1521–1526. doi: 10.1002/smll.201102240
- Issue published online: 14 MAY 2012
- Article first published online: 14 MAR 2012
- Manuscript Revised: 6 DEC 2011
- Manuscript Received: 24 OCT 2011
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