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Graphene Metrology: Centimeter-Scale High-Resolution Metrology of Entire CVD-Grown Graphene Sheets (Small 18/2011)

  1. Jennifer Reiber Kyle1,
  2. Ali Guvenc1,
  3. Wei Wang2,
  4. Maziar Ghazinejad2,
  5. Jian Lin2,
  6. Shirui Guo3,
  7. Cengiz S. Ozkan2,*,
  8. Mihrimah Ozkan1,*

Article first published online: 12 SEP 2011

DOI: 10.1002/smll.201190068

Issue

Small

Small

Volume 7, Issue 18, page 2598, September 19, 2011

Additional Information

How to Cite

Kyle, J. R., Guvenc, A., Wang, W., Ghazinejad, M., Lin, J., Guo, S., Ozkan, C. S. and Ozkan, M. (2011), Graphene Metrology: Centimeter-Scale High-Resolution Metrology of Entire CVD-Grown Graphene Sheets (Small 18/2011). Small, 7: 2598. doi: 10.1002/smll.201190068

Author Information

  1. 1

    Department of Electrical Engineering, University of California, Riverside, CA 92521, USA

  2. 2

    Department of Mechanical Engineering and the Materials Science and Engineering Program, University of California, Riverside, CA 92521, USA

  3. 3

    Department of Chemistry, University of California, Riverside, CA 92521, USA

*Department of Mechanical Engineering and the Materials Science and Engineering Program, University of California, Riverside, CA 92521, USA.

Publication History

  1. Issue published online: 12 SEP 2011
  2. Article first published online: 12 SEP 2011

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Keywords:

  • chemical vapor deposition;
  • fluorescence;
  • graphene;
  • layered materials;
  • metrology
Thumbnail image of graphical abstract

The image shows the segmented fluorescence quenching microscopy image of a large-area graphene sample fabricated via chemical vapor deposition. This new metrology technique allows identification of graphene layers over a large area by utilizing the fact that graphene quenches fluorescence through resonant energy transfer. Fluorescence quenching is visualized by spin-coating a dye-polymer mixture over the graphene sample. Fluorescence quenching contrast is controlled by setting the dye layer thickness. For few-layer graphene characterization, a 30-nm-thick dye layer is used. Once the fluorescence image is collected, histogram-based segmentation is used to identify individual graphene layers. This metrology technique is well suited for many industrial applications.

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