Get access

Enhancing the Humidity Sensitivity of Ga2O3/SnO2 Core/Shell Microribbon by Applying Mechanical Strain and Its Application as a Flexible Strain Sensor

Authors

  • Kewei Liu,

    Corresponding author
    1. International Center for Materials, Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), Tsukuba 305-0044, Japan
    • International Center for Materials, Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), Tsukuba 305-0044, Japan.
    Search for more papers by this author
  • Makoto Sakurai,

    Corresponding author
    1. International Center for Materials, Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), Tsukuba 305-0044, Japan
    • International Center for Materials, Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), Tsukuba 305-0044, Japan.
    Search for more papers by this author
  • Masakazu Aono

    Corresponding author
    1. International Center for Materials, Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), Tsukuba 305-0044, Japan
    • International Center for Materials, Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), Tsukuba 305-0044, Japan.
    Search for more papers by this author

Abstract

The humidity sensitivity of a single β-Ga2O3/amorphous SnO2 core/shell microribbon on a flexible substrate is enhanced by the application of tensile strain and increases linearly with the strain. The strain-induced enhancement originates from the increase in the effective surface area where water molecules are adsorbed. This strain dependence of humidity sensitivity can be used to monitor the external strain. The strain sensing of the microribbon device under various amounts of mechanical loading shows excellent reliability and reproducibility with a gauge factor of −41. The flexible device has high potential to detect both humidity and strain at room temperature. These findings and the mechanism involved are expected to pave the way for new flexible strain and multifunctional sensors.

Get access to the full text of this article

Ancillary