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Keywords:

  • PEDOT:PSS;
  • nanoimprints;
  • organic electronics;
  • GISAXS;
  • water vapor
Thumbnail image of graphical abstract

PEDOT:PSS thin films are successfully patterned using water-vapor-assisted nanoimprinting, a process compatible with organic electronic devices. The imprinted patterns are characterized via grazing-incident small-angle X-ray scattering and scanning electron microscopy. Superior pattern transfer quality of water-vapor assisted nanoimprinting over conventional thermal nanoimprinting is demonstrated.