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3D Nanofabrication of Fluidic Components by Corner Lithography†

  1. Erwin J. W. Berenschot1,
  2. Narges Burouni1,
  3. Bart Schurink2,
  4. Joost W. van Honschoten1,
  5. Remco G. P. Sanders1,
  6. Roman Truckenmuller2,
  7. Henri V. Jansen1,
  8. Miko C. Elwenspoek1,
  9. Aart A. van Apeldoorn2,
  10. Niels R. Tas1,*

Article first published online: 21 AUG 2012

DOI: 10.1002/smll.201201446

Issue

Small

Small

Volume 8, Issue 24, pages 3823–3831, December 21, 2012

Additional Information

How to Cite

Berenschot, E. J. W., Burouni, N., Schurink, B., van Honschoten, J. W., Sanders, R. G. P., Truckenmuller, R., Jansen, H. V., Elwenspoek, M. C., van Apeldoorn, A. A. and Tas, N. R. (2012), 3D Nanofabrication of Fluidic Components by Corner Lithography. Small, 8: 3823–3831. doi: 10.1002/smll.201201446

Author Information

  1. 1

    Transducers Science and Technology Group, MESA+ Institute for Nanotechnology, University of Twente, P. O. Box 217, 7500 AE Enschede, The Netherlands

  2. 2

    Tissue Regeneration Group, MIRA Institute for Biomedical Technology and Technical Medicine, University of Twente, P. O. Box 217, 7500 AE Enschede, The Netherlands

*Transducers Science and Technology Group, MESA+ Institute for Nanotechnology, University of Twente, P. O. Box 217, 7500 AE Enschede, The Netherlands.

  1. †

    Dr. Joost W. van Honschoten is deceased, as of January 12th, 2011.

Publication History

  1. Issue published online: 15 DEC 2012
  2. Article first published online: 21 AUG 2012
  3. Manuscript Received: 26 JUN 2012

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Keywords:

  • dip-pen nanolithography;
  • nanostructures;
  • nanowires;
  • microfluidics;
  • 3D nanofabrication

Abstract

A reproducible wafer-scale method to obtain 3D nanostructures is investigated. This method, called corner lithography, explores the conformal deposition and the subsequent timed isotropic etching of a thin film in a 3D shaped silicon template. The technique leaves a residue of the thin film in sharp concave corners which can be used as structural material or as an inversion mask in subsequent steps. The potential of corner lithography is studied by fabrication of functional 3D microfluidic components, in particular i) novel tips containing nano-apertures at or near the apex for AFM-based liquid deposition devices, and ii) a novel particle or cell trapping device using an array of nanowire frames. The use of these arrays of nanowire cages for capturing single primary bovine chondrocytes by a droplet seeding method is successfully demonstrated, and changes in phenotype are observed over time, while retaining them in a well-defined pattern and 3D microenvironment in a flat array.

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