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3D Nanofabrication of Fluidic Components by Corner Lithography

Authors

  • Erwin J. W. Berenschot,

    1. Transducers Science and Technology Group, MESA+ Institute for Nanotechnology, University of Twente, P. O. Box 217, 7500 AE Enschede, The Netherlands
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  • Narges Burouni,

    1. Transducers Science and Technology Group, MESA+ Institute for Nanotechnology, University of Twente, P. O. Box 217, 7500 AE Enschede, The Netherlands
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  • Bart Schurink,

    1. Tissue Regeneration Group, MIRA Institute for Biomedical Technology and Technical Medicine, University of Twente, P. O. Box 217, 7500 AE Enschede, The Netherlands
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  • Joost W. van Honschoten,

    1. Transducers Science and Technology Group, MESA+ Institute for Nanotechnology, University of Twente, P. O. Box 217, 7500 AE Enschede, The Netherlands
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  • Remco G. P. Sanders,

    1. Transducers Science and Technology Group, MESA+ Institute for Nanotechnology, University of Twente, P. O. Box 217, 7500 AE Enschede, The Netherlands
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  • Roman Truckenmuller,

    1. Tissue Regeneration Group, MIRA Institute for Biomedical Technology and Technical Medicine, University of Twente, P. O. Box 217, 7500 AE Enschede, The Netherlands
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  • Henri V. Jansen,

    1. Transducers Science and Technology Group, MESA+ Institute for Nanotechnology, University of Twente, P. O. Box 217, 7500 AE Enschede, The Netherlands
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  • Miko C. Elwenspoek,

    1. Transducers Science and Technology Group, MESA+ Institute for Nanotechnology, University of Twente, P. O. Box 217, 7500 AE Enschede, The Netherlands
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  • Aart A. van Apeldoorn,

    1. Tissue Regeneration Group, MIRA Institute for Biomedical Technology and Technical Medicine, University of Twente, P. O. Box 217, 7500 AE Enschede, The Netherlands
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  • Niels R. Tas

    Corresponding author
    1. Transducers Science and Technology Group, MESA+ Institute for Nanotechnology, University of Twente, P. O. Box 217, 7500 AE Enschede, The Netherlands
    • Transducers Science and Technology Group, MESA+ Institute for Nanotechnology, University of Twente, P. O. Box 217, 7500 AE Enschede, The Netherlands.
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  • Dr. Joost W. van Honschoten is deceased, as of January 12th, 2011.

Abstract

A reproducible wafer-scale method to obtain 3D nanostructures is investigated. This method, called corner lithography, explores the conformal deposition and the subsequent timed isotropic etching of a thin film in a 3D shaped silicon template. The technique leaves a residue of the thin film in sharp concave corners which can be used as structural material or as an inversion mask in subsequent steps. The potential of corner lithography is studied by fabrication of functional 3D microfluidic components, in particular i) novel tips containing nano-apertures at or near the apex for AFM-based liquid deposition devices, and ii) a novel particle or cell trapping device using an array of nanowire frames. The use of these arrays of nanowire cages for capturing single primary bovine chondrocytes by a droplet seeding method is successfully demonstrated, and changes in phenotype are observed over time, while retaining them in a well-defined pattern and 3D microenvironment in a flat array.

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