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Large Area Resist-Free Soft Lithographic Patterning of Graphene

Authors

  • Antony George,

    1. Inorganic Materials Science, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands
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  • S. Mathew,

    1. NUSNNI NanoCore, Department of Electrical and Computer Engineering, National University of Singapore, 117576, Singapore
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  • Raoul van Gastel,

    Corresponding author
    1. Physics of Interfaces and Nanomaterials, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands
    • Physics of Interfaces and Nanomaterials, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands.
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  • Maarten Nijland,

    1. Inorganic Materials Science, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands
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  • K. Gopinadhan,

    1. NUSNNI NanoCore, Department of Electrical and Computer Engineering, National University of Singapore, 117576, Singapore
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  • Peter Brinks,

    1. Inorganic Materials Science, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands
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  • T. Venkatesan,

    1. NUSNNI NanoCore, Department of Electrical and Computer Engineering, National University of Singapore, 117576, Singapore
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  • Johan E. ten Elshof

    Corresponding author
    1. Inorganic Materials Science, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands
    • Inorganic Materials Science, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands
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Abstract

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Large area low-cost patterning is a challenging problem in graphene research. A resist-free, single-step, large area and cost effective soft lithographic patterning strategy is presented for graphene. The technique is applicable on any arbitrary substrate that needs to be covered with a graphene film and provides a viable route to large-area patterning of graphene for device applications.

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