SEARCH

SEARCH BY CITATION

Keywords:

  • microfabrication;
  • X-ray lithography;
  • microchannels;
  • thermally rearranged polymers;
  • microporosity
Thumbnail image of graphical abstract

Microchannels are fabricated using a photosensitive polymer to which microporosity is tuned with different X-ray doses. Using hard X-ray irradiation, the micropattern is positioned with various geometries in a multi-level, three-dimensional structure, while controlling the pore size and transport properties of small molecules. This highly reliable fabrication process has potential for use in microfluidic devices with enhanced transport properties through microchannels.