Microfluidic Surface-Enhanced Raman Scattering Sensors Based on Nanopillar Forests Realized by an Oxygen-Plasma-Stripping-of-Photoresist Technique

Authors

  • Haiyang Mao,

    1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, PR China
    2. Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, PR China
    3. Smart Sensor Engineering Center, Jiangsu R&D Center for Internet of Things, Wuxi 214135, PR China
    Search for more papers by this author
  • Wengang Wu,

    Corresponding author
    1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, PR China
    • National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, PR China.

    Search for more papers by this author
  • Didi She,

    1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, PR China
    Search for more papers by this author
  • Gongchen Sun,

    1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, PR China
    Search for more papers by this author
  • Pengpeng Lv,

    1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, PR China
    Search for more papers by this author
  • Jun Xu

    1. Electron Microscopy Laboratory, School of Physics, Peking University, Beijing 100871, PR China
    Search for more papers by this author

Abstract

A novel surface-enhanced Raman scattering (SERS) sensor is developed for real-time and highly repeatable detection of trace chemical and biological indicators. The sensor consists of a polydimethylsiloxane (PDMS) microchannel cap and a nanopillar forest-based open SERS-active substrate. The nanopillar forests are fabricated based on a new oxygen-plasma-stripping-of-photoresist technique. The enhancement factor (EF) of the SERS-active substrate reaches 6.06 × 106, and the EF of the SERS sensor is about 4 times lower due to the influence of the PDMS cap. However, the sensor shows much higher measurement repeatability than the open substrate, and it reduces the sample preparation time from several hours to a few minutes, which makes the device more reliable and facile for trace chemical and biological analysis.

Ancillary